BOLOMETRIC DETECTOR FOR DETECTING ELECTROMAGNETIC RADIATION IN TERAHERTZ FREQUENCY BAND FROM INFRARED AND ARRAY DETECTION DEVICE INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a bolometric detector that detects electromagnetic radiation in a terahertz frequency band from an infrared.SOLUTION: A bolometric micro bridge structure 56 supported above a substrate 52 by first and second crossed bow-tie antennas 54 and 68 for collecting electromagnetic radiation and by support and thermal isolation arms 62, comprises a thermometric element to be coupled with a resistance load so that a temperature can be raised by the resistance load to be coupled with the antennas 54 and 68 for converting the collected electromagnet into the amount of heat and by the generated amount of heat. The first antenna 54 is located outside the micro bridge 56 and coupled with the resistance load, and the second antenna is located in the micro bridge 56 and resistively coupled with the resistance load.