发明名称 FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
摘要 A functional device includes a movable member that can be displaced along a first axis, a movable electrode part extended from the movable member, a fixed electrode part provided to be opposed to the movable electrode part, and a stopper part that regulates displacement of the movable member. A projecting part projecting along the first axis is provided on the movable member, and a distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part.
申请公布号 US2015059474(A1) 申请公布日期 2015.03.05
申请号 US201414468632 申请日期 2014.08.26
申请人 Seiko Epson Corporation 发明人 TANAKA Satoru
分类号 G01P15/125 主分类号 G01P15/125
代理机构 代理人
主权项 1. A functional device comprising: a movable member that can be displaced along a first axis; a movable electrode part extended from the movable member; a fixed electrode part provided to be opposed to the movable electrode part; and a stopper part that regulates displacement of the movable member, wherein a projecting part projecting along the first axis is provided on the movable member, and a distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part.
地址 Tokyo JP