发明名称 GAS SENSOR AND METHOD FOR MANUFACTURING SAME
摘要 A method for manufacturing a gas sensor according to an embodiment of the present invention comprises the steps of: a) forming a photoresist wire connecting a pair of photoresist electrodes, which are spaced apart from each other, with the upper parts of the pair of the photoresist electrodes by exposing a first photoresist applied on a substrate to light and developing the exposed first photoresist; b) forming a pair of a carbon electrode and a carbon wire, which are integrally connected to each other, by thermal decomposition of the pair of photoresist electrodes and the photoresist wire; and c) forming a metal oxide nanowire on a surface of the carbon wire.
申请公布号 WO2015030528(A1) 申请公布日期 2015.03.05
申请号 WO2014KR08080 申请日期 2014.08.29
申请人 SK INNOVATION CO.,LTD.;UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION 发明人 SHIN, HEUNG JOO;LIM, YEONG JIN;HEO, JEONG IL
分类号 G01N27/12;B82B3/00 主分类号 G01N27/12
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