发明名称 |
GAS SENSOR AND METHOD FOR MANUFACTURING SAME |
摘要 |
A method for manufacturing a gas sensor according to an embodiment of the present invention comprises the steps of: a) forming a photoresist wire connecting a pair of photoresist electrodes, which are spaced apart from each other, with the upper parts of the pair of the photoresist electrodes by exposing a first photoresist applied on a substrate to light and developing the exposed first photoresist; b) forming a pair of a carbon electrode and a carbon wire, which are integrally connected to each other, by thermal decomposition of the pair of photoresist electrodes and the photoresist wire; and c) forming a metal oxide nanowire on a surface of the carbon wire. |
申请公布号 |
WO2015030528(A1) |
申请公布日期 |
2015.03.05 |
申请号 |
WO2014KR08080 |
申请日期 |
2014.08.29 |
申请人 |
SK INNOVATION CO.,LTD.;UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION |
发明人 |
SHIN, HEUNG JOO;LIM, YEONG JIN;HEO, JEONG IL |
分类号 |
G01N27/12;B82B3/00 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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