发明名称 INDUCTIVE DEVICES AND LOW FLOW PLASMAS USING THEM
摘要 Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
申请公布号 US2015060418(A1) 申请公布日期 2015.03.05
申请号 US201414479355 申请日期 2014.09.07
申请人 PERKINELMER HEALTH SCIENCES, INC. 发明人 Morrisroe Peter
分类号 H05H1/30;B23K10/00 主分类号 H05H1/30
代理机构 代理人
主权项
地址 WALTHAM MA US
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