| 发明名称 |
METHOD FOR THE CORRECTION OF ELECTRON PROXIMITY EFFECTS |
| 摘要 |
Disclosed is a method for projecting an electron beam onto a target, comprising the correction of electron scattering in the target. Said correction is made possible by a step in which a point spread function is calculated that has a radial variation according to a polynomial function in arrays. |
| 申请公布号 |
WO2015028753(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
WO2014FR52139 |
申请日期 |
2014.08.28 |
| 申请人 |
ASELTA NANOGRAPHICS |
发明人 |
JEDIDI, NADER;SCHIAVONE, PATRICK;TORTAI, JEAN-HERVÉ;FIGUEIRO, THIAGO |
| 分类号 |
G03F7/20;H01J37/317 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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