| 摘要 |
<p>This pressure control valve is provided with: a pressure adjustment space in which an opening at one end of an upstream flow path and an opening at one end of a downstream flow path are both formed communicating with one another; a valve mechanism which has a valve body driven in the direction for opening or closing the two aforementioned openings in the pressure adjustment space, and which changes, by the position of the valve body, the size of the gap that allows communication between the opening at one end of the upstream flow path and the opening at one end of the downstream flow path; an actuator which drives the valve body in one direction; and a control unit which controls operation of the actuator. The actuator includes a piezo mechanism which has a piezo element and changes the position of the valve body in one direction depending on the magnitude of the voltage applied to said piezo element, and a stepping mechanism which has a courser control resolution and wider dynamic range than the piezo mechanism, is provided with a stepping motor, and displaces the piezo element in the aforementioned one direction each time said stepping motor rotates one step.</p> |
