| 发明名称 |
DEFLECTION PLATE AND DEFLECTION DEVICE FOR DEFLECTING CHARGED PARTICLES |
| 摘要 |
<p>A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.</p> |
| 申请公布号 |
KR20150023565(A) |
申请公布日期 |
2015.03.05 |
| 申请号 |
KR20147037094 |
申请日期 |
2012.05.31 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
APTAKER PETER SIMON;BEASLEY PAUL;HEID OLIVER |
| 分类号 |
H05H7/00 |
主分类号 |
H05H7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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