发明名称 |
GYRO METER IN SURFACE TECHNOLOGY USING ANTIPLANE DETECTION WITH STRAIN GAUGE |
摘要 |
PROBLEM TO BE SOLVED: To provide a new gyro meter which can achieve detection of rotation around a shaft located on its own plane.SOLUTION: A gyro meter comprises: at least one block 3 and 3' contained in a substrate and for defining an unused plane, where the block 3 and 3'is arranged at predetermined distance away from a second rotary shaft Z of rotation contained in this plane to cause vibration in this plane perpendicular to the above rotary shaft Z; at least two connection arms 8 and 8' for connecting the block 3 and 3' with the rotary shaft Z; means to form at least one connection part with the substrate for rotation around the rotary shaft Z to at least one of the arms 8 and 8'; and at least one strain gauge 4 for detecting rotation movement. |
申请公布号 |
JP2015042984(A) |
申请公布日期 |
2015.03.05 |
申请号 |
JP20140208152 |
申请日期 |
2014.10.09 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
ROBERT PHILIPPE |
分类号 |
G01C19/574;B81B3/00;G01C19/56;H01L29/84 |
主分类号 |
G01C19/574 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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