VACUUM FILM DEPOSITION DEVICE AND VACUUM FILM DEPOSITION METHOD

摘要

In order to provide an adhesion preventing plate for a vacuum film formation apparatus, the adhesion preventing plate being capable of suppressing the peel-off of an adhered film to an extremely low level regardless of a protection target member, the adhesion preventing plate is arranged so that the area of contact with the protection target member is reduced and a part other than the contact surface is thermally insulated.

主权项

1. A vacuum film formation apparatus forming a film of a film formation substance on a substrate, the vacuum film formation apparatus comprising:
an adhesion preventing plate arranged to cover at least a part of a protection target member cooled by cooling means, the adhesion preventing plate preventing adhesion of particles of the film formation substance to the protection target member, wherein the adhesion preventing plate is arranged in such a manner that the area of a contact surface between other structure including the protection target member and the adhesion preventing plate is made smaller than the area of a film adhesion surface of the adhesion preventing plate to which particles of the film formation substance are adhered, and a first heat insulation member is provided between a surface other than the contact surface of the adhesion preventing plate, the surface facing the protection target member, and other structure including the protection target member.