发明名称 DEVICE FOR FORMING SEPARATION STARTING POINT, STACK MANUFACTURING APPARATUS, AND METHOD FOR FORMING SEPARATION STARTING POINT
摘要 A device for forming a separation starting point that allows separation of a surface layer of a processed member to form a remaining portion is provided. A manufacturing device of a stack including a support and a remaining portion of a processed member whose surface layer is separated is provided. The device for forming the separation starting point includes a stage that supports the processed member, a cutter that faces the stage, a head portion that supports the cutter, an arm portion that supports the head portion, and a moving mechanism that relatively moves the cutter to the stage.
申请公布号 US2015059986(A1) 申请公布日期 2015.03.05
申请号 US201414468801 申请日期 2014.08.26
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 KOMATSU Ryu;YOKOYAMA Kohei;OHNO Masakatsu;IDOJIRI Satoru;IKEDA Hisao;JINBO Yasuhiro;ADACHI Hiroki;HIRAKATA Yoshiharu;EGUCHI Shingo;NAKAMURA Daiki
分类号 B26D3/28;B32B38/00;B32B38/10;B26D1/14 主分类号 B26D3/28
代理机构 代理人
主权项 1. A device for forming a separation starting point comprising: a stage configured to support a processed member to be provided with the separation starting point that allows separation of a surface layer of the processed member to form a remaining portion; a cutter that faces the stage; a head portion that supports the cutter; an arm portion that supports the head portion; and a moving mechanism configured to determine a relative position of the cutter to the stage, wherein the cutter is configured to cut the processed member while leaving part of the processed member, and wherein the moving mechanism relatively moves the cutter along the stage.
地址 Atsugi-shi JP