METHOD FOR MANUFACTURING PNbZT THIN FILM

摘要

The present invention provides a method for manufacturing a PNbZT thin film having higher piezoelectric characteristics and dielectric characteristics, with the respective compositions within the film being substantially uniform. This method for manufacturing the PNbZT thin film includes: a step for preparing a plurality of different types of sol-gel fluids having different concentration ratios of zirconium and titanium (Zr/Ti) while satisfying the composition ratio PbzNb × ZryTi1 - yO3(0 < x ≤ 0.05, 0.40 ≤ y ≤ 0.60, and 1.05 ≤ z ≤ 1.25); a step for laminating two or more calcined films (11a-11c) having progressively smaller concentration ratios of Zr/Ti on a substrate (12) by selecting a prescribed sol-gel fluid from among the plurality of types of sol-gel fluids such that the concentration ratios of Zr/Ti become progressively smaller, and then coating the sol-gel fluid onto the substrate and calcining the sol-gel fluid two or more times; and a step for attaining a single PNbZT thin film (11) by baking the plurality of calcined films (11a-11c) simultaneously.