| 摘要 |
<p>The present invention provides a cantilever-type probe which makes it possible to eliminate the drawbacks of a conventional cantilevered probe and consequently raise the level of integration of an object to be measured. This cantilever-type probe is provided with a fixed section fixed to a support member, a spring section extending for a predetermined length from the fixed section, and a contact section which extends diagonally from the spring section in a direction that is along an extension of the spring section and that goes away from the surface of the support member and which has a free end possessing a point of contact with an object to be measured. The cantilever-type probe is characterized by the following: a fulcrum in contact with the surface of the support member is formed on the contact section; the spring section is elastically deformable; the contact section and the fulcrum are more rigid than a base; when the contact point of the contact section makes contact with the object to be measured and the contact section rotates in the direction of the support member, the spring section is elastically deformed convexly in the direction going away from the support member; in association therewith, the fulcrum slides over the surface of the support member and moves toward the fixed section; and fluctuations in the longitudinal position of the contact point of the contact section due to the aforementioned rotation of the contact section are thereby absorbed.</p> |
