| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of improving energy resolution of an energy filter.SOLUTION: A charged particle beam device including energy filters (17, 25, 26) for energy-filtering charged particles emitted from a sample comprises a first deflection element (20) which deflects the charged particles emitted from the sample so as to be spaced apart from an optical axis of a charged particle beam and a second deflection element (focusing lens) which further deflects the charged particles deflected by the first deflection element. |
