| 发明名称 |
ACCELERATION SENSOR |
| 摘要 |
Disclosed herein is an acceleration sensor including: a mass; a flexible beam on which an electrode or a piezoresistive element is disposed and the mass is coupled; and a support part connecting to and supporting the flexible beam and having therein a stress isolating slit facing the mass, wherein the mass, the flexible beam and the support part are formed by coupling first and second substrates, wherein the first substrate has a first masking pattern formed thereon corresponding to the flexible beam, the mass and the support part and the second substrate has a second masking pattern formed thereon corresponding to the mass and the support part. |
| 申请公布号 |
US2015059477(A1) |
申请公布日期 |
2015.03.05 |
| 申请号 |
US201414462359 |
申请日期 |
2014.08.18 |
| 申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
Kim Jong Woon;Lee Sung Jun;Lim Chang Hyun |
| 分类号 |
G01P15/12;H01L41/113 |
主分类号 |
G01P15/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An acceleration sensor comprising:
a mass; a flexible beam on which an electrode or a piezoresistive element is disposed and the mass is coupled; and a support part connecting to and supporting the flexible beam and having therein a stress isolating slit facing the mass, wherein the mass, the flexible beam and the support part are formed by coupling first and second substrates, wherein the first substrate has a first masking pattern formed thereon corresponding to the flexible beam, the mass and the support part and the second substrate has a second masking pattern formed thereon corresponding to the mass and the support part. |
| 地址 |
Suwon-Si KR |
