FLUID ANALYSIS DEVICE, THERMAL FLOWMETER, MASS FLOW CONTROLLER, FLUID PROPERTY SPECIFICATION DEVICE, AND PROGRAM FOR FLUID ANALYSIS DEVICE

摘要

The present invention is configured so as to compute a fluid-specific value indicating a characteristic value corresponding to the heat transfer coefficient of a fluid on the basis of an upstream parameter which is a value relating to the rate of change of an upstream voltage when the flow rate of a fluid to be measured changes, and a downstream parameter which is a value relating to the rate of change of a downstream voltage when the flow rate of the fluid to be measured changes.