Controller for actuating a micromechanical actuator, actuating system for actuating a micromechanical actuator, micro-mirror system and method for actuating a micromechanical actuator

摘要

A controller for a micromechanical actuator, and corresponding actuating system, micro-mirror system and method, including a first input for a reference signal, a second input for a measuring signal denoting a recorded response to a control signal, a first controller element to filter/attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered/attenuated reference signal, a second controller element to modify the received measuring signal to minimize the quality of the first/further modes by processing the received measuring signal and to output a modified measuring signal, a third controller element to minimize deviation between the filtered/attenuated reference and received measuring signals and to output a minimized reference signal, a fourth controller element to rotate the phase of the difference between the minimized reference and modified measuring signals for at least one predefined frequency and to transmit the modified reference as the control signal.

主权项

1. A controller for actuating a micromechanical actuator, comprising:
a first signal input to receive a reference signal; a second signal input to receive a measuring signal which denotes a recorded response by the micromechanical actuator to a measuring signal; a first controller element to filter and/or attenuate predefined frequency modes and/or predefined frequency components in the received reference signal and to output a filtered and/or attenuated reference signal; a second controller element to modify the received measuring signal by minimizing the quality of the first mode and/or further modes of the micromechanical actuator by processing the received measuring signal in the closed loop circuit, and to output a modified measuring signal; a third controller element to minimize the deviation between the filtered and/or the attenuated reference signal and the received measuring signal and to output a minimized reference signal; and a fourth controller element to rotate the phase of the difference between the minimized reference signal and the modified measuring signal for at least one predefined frequency and to transmit it as the control signal to the micromechanical actuator.