发明名称 SAMPLE-RETAINER
摘要 The present invention is a sample-retainer provided with a base upon which a plurality of ceramic substrates are stacked and which has a sample-retaining surface on the top thereof, said sample-retainer being such that the base is provided with: a first ceramic substrate having a channel for a thermal medium in the interior thereof; and a second ceramic substrate which is stacked higher than the first ceramic substrate, the top of said second ceramic substrate being a sample-retaining surface, said second ceramic substrate comprising the same material as the first ceramic substrate. In the sample-retainer, the average particle size of ceramic particles constituting the second ceramic substrate is smaller or larger than the average particle size of ceramic particles constituting the first ceramic substrate.
申请公布号 WO2015029575(A1) 申请公布日期 2015.03.05
申请号 WO2014JP67155 申请日期 2014.06.27
申请人 KYOCERA CORPORATION 发明人 SATO, MASAHIRO
分类号 H01L21/683 主分类号 H01L21/683
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