发明名称 SHEET FOR PROCESSING SEMICONDUCTOR
摘要 A sheet (1) for processing a semiconductor, provided with a substrate (2) and an adhesive layer (3) laminated on at least one surface of the substrate, wherein the adhesive layer (3) is formed from an adhesive composition containing: a polymer having a salt and an energy ray-curable base, and an energy ray-curable adhesive component (excluding the noted polymer). According to the sheet (1) for processing a semiconductor, it is possible to inhibit pollution of an adherend during peeling after energy ray irradiation while also demonstrating sufficient antistatic properties.
申请公布号 WO2015030186(A1) 申请公布日期 2015.03.05
申请号 WO2014JP72765 申请日期 2014.08.29
申请人 LINTEC CORPORATION 发明人 YAMASHITA, SHIGEYUKI;SATO, AKINORI
分类号 C09J7/02;C09J9/02;C09J11/06;C09J133/00;H01L21/301;H01L21/304 主分类号 C09J7/02
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