发明名称 SUSCEPTOR
摘要 Provided is a susceptor capable of improving thermal uniformity while suppressing reduction in temperature increase speed and heat utilization efficiency in the susceptor. The susceptor (100) comprises: a plate-shaped first member (10) having a wafer arrangement surface on which wafers are arranged; and a second member (20) supporting the first member (10) and laminated upon the first member (10) in a direction orthogonal to the wafer arrangement surface. The thermal conductivity of the first member (10) is higher than the thermal conductivity of the second member (20).
申请公布号 WO2015030167(A1) 申请公布日期 2015.03.05
申请号 WO2014JP72725 申请日期 2014.08.29
申请人 BRIDGESTONE CORPORATION 发明人 KOBAYASHI, FUMIYA;KUMAGAI, SHO;USHITA, KAZUHIRO;ONISHI, TADASHI;ISHIGAKI, TOMONORI
分类号 H01L21/683;C23C16/44;C23C16/458;H01L21/205 主分类号 H01L21/683
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