NANO-GAP ELECTRODE AND METHODS FOR MANUFACTURING SAME

摘要

The present disclosure provides methods for forming a nano-gap electrode. In some cases, a nano-gap having a width adjusted by a film thickness of a sidewall may be formed between a first electrode-forming part and a second electrode-forming part using sidewall which has contact with first electrode-forming part as a mask. Surfaces of the first electrode- forming part, the sidewall and the second electrode-forming part may then be exposed. The sidewall may then be removed to form a nano-gap between the first electrode-forming part and the second electrode-forming part.