| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection method and an inspection apparatus capable of stably detecting flaws on the whole circumference of a workpiece without processing the workpiece which is an object to be inspected or without attaching another portion. <P>SOLUTION: The inspection apparatus and the inspection method are used for inspecting a cylindrical surface of a workpiece W by an inspection part 4. While supporting the workpiece W by a pair of rotating shafts 11, 12 the rotational axes L1, L2 of which are arranged in parallel with each other, a rotor 31 is brought into contact with the workpiece W. By rotationally driving the pair of rotating shafts 11, 12, the rotor 31 can be rotated together with the workpiece W. A rotation state of the rotor 31 is detected in reference time that the workpiece W is rotated around the axis of the workpiece W by one revolution without generating slip between the rotating shafts 11, 12 and the workpiece W. While determining whether or not slip exists between the workpiece W and the rotating shafts 11, 12 on the basis of the rotation state, an image of the workpiece W is picked up. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
