摘要 |
<p>1,265,069. Resistors. WESTERN ELECTRIC CO. Inc. 21 May, 1969 [22 May, 1968], No. 25937/69. Heading H1S. [Also in Division C7] A resistor comprises a non-conducting substrate bearing a thin film of Ta-Al alloy containing 25-60 atom per cent Al. As shown in Fig. 2B, glass or ceramic substrate 21 is coated with a 400 Š-25,000 Š thick film 22 of Ta-Al by cathode sputtering or vacuum evaporation and then with conductor 23, e.g. of "Nichrome" (Registered Trade Mark) followed by Au. Then a conductor pattern is produced by photoengraving as shown in Fig. 2C. Next, Fig. 2E, a Ta-Al resistor pattern is produced by photoengraving and this is anodized to yield oxide film 26. Trim anodizing and/or thermal preageing may follow and the resulting assembly is then separated into individual resistors.</p> |