发明名称 Metallschichtwiderstand
摘要 <p>1,265,069. Resistors. WESTERN ELECTRIC CO. Inc. 21 May, 1969 [22 May, 1968], No. 25937/69. Heading H1S. [Also in Division C7] A resistor comprises a non-conducting substrate bearing a thin film of Ta-Al alloy containing 25-60 atom per cent Al. As shown in Fig. 2B, glass or ceramic substrate 21 is coated with a 400 Š-25,000 Š thick film 22 of Ta-Al by cathode sputtering or vacuum evaporation and then with conductor 23, e.g. of "Nichrome" (Registered Trade Mark) followed by Au. Then a conductor pattern is produced by photoengraving as shown in Fig. 2C. Next, Fig. 2E, a Ta-Al resistor pattern is produced by photoengraving and this is anodized to yield oxide film 26. Trim anodizing and/or thermal preageing may follow and the resulting assembly is then separated into individual resistors.</p>
申请公布号 CH495040(A) 申请公布日期 1970.08.15
申请号 CH19690007812 申请日期 1969.05.22
申请人 WESTERN ELECTRIC COMPANY, INCORPORATED 发明人 ARCHIBALD STEIDEL,CHARLES
分类号 C23C14/18;H01B1/00;H01C7/00;H01C17/12;(IPC1-7):H01C7/00;H01C17/00 主分类号 C23C14/18
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