METHODS AND APPARATUSES FOR TRANSFERRING ARTICLES THROUGH A LOAD LOCK CHAMBER UNDER VACUUM
摘要
<p>Methods and apparatuses directed to vacuum-assisted processing of articles are disclosed whereby the articles are directed between staging chamber (15) and a processing chamber (11) with both chambers maintained at substantially equivalent low pressures to enhance system efficiency and product quality, and wherein magnetic coupled drive mechanisms (43) are used to locate the article before and after processing.</p>
申请公布号
EP1749116(B1)
申请公布日期
2015.03.04
申请号
EP20050749791
申请日期
2005.05.13
申请人
FERROTEC (USA) CORPORATION
发明人
SAJJAD, BASHA, S.;SIN, PHENG;SENGUPTA, SUBHASHISH;EREZ, SHMUEL;KRONEBERGER, CRIS, KEITH
