发明名称 |
HOT-WIRE METHOD FOR DEPOSITING SEMICONDUCTOR MATERIAL ON A SUBSTRATE AND DEVICE FOR PERFORMING THE METHOD |
摘要 |
A hot wire device and method for depositing semiconductor material onto a substrate in a deposition chamber in which the ends of at least two filaments are clamped into a filament holder and heated by supplying current, wherein a voltage for generating an electrical current is applied in temporal succession to filaments made of differing materials so that a number of differing semiconductors corresponding to the number of consecutively heated filament materials can be consecutively deposited onto the substrate without opening the chamber. |
申请公布号 |
EP2699711(B1) |
申请公布日期 |
2015.03.04 |
申请号 |
EP20120724070 |
申请日期 |
2012.03.30 |
申请人 |
FORSCHUNGSZENTRUM JÜLICH GMBH |
发明人 |
FINGER, FRIEDHELM;SCHMALEN, ANDREAS;WOLFF, JOHANNES |
分类号 |
C23C16/24;C23C16/32;C23C16/448;H01L21/02 |
主分类号 |
C23C16/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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