PROCESS FOR PRODUCING LAYERED PRODUCT, LAYERED PRODUCT, PROCESS FOR PRODUCING LAYERED PRODUCT WITH DEVICE USING SAID LAYERED PRODUCT, AND LAYERED PRODUCT WITH DEVICE

摘要

There is provided a polyimide layered product with a support which has a smooth surface to enable a sophisticated device to be formed thereon and in which the layered polyimide does not peel off even in a high-temperature process on device formation, and furthermore, the polyimide layered product can be peeled off easily from the support after the device is formed on the polyimide layered product. By preparing a polyimide film with a face at the support side and subjected to a surface treatment; subjecting at least one of a face of the support and the face of the polyimide film which are opposite to each other to a patterning treatment using a coupling agent to form a satisfactorily bondable part and an easily releasable part which differ in adhesion/peel strength; subsequently, superposing the support and the polyimide film to be subjected to a pressurizing/heating treatment and to be bonded to each other; subjecting the surface of the polyimide film to an organic alkali treatment; and then, applying a polyamic acid solution free from a slip agent ingredient, drying the coating film and imidizing the film, a layered product having a structure of at least three layers in which at least one layer contains a slip agent material and both surface layers have no slip agent material is produced.