| 摘要 |
PROBLEM TO BE SOLVED: To provide a press device capable of accurately and numerically grasping the state at the time of pressing for stably planarizing an apex of a particle formation member with high speed and high accuracy from low load region to high load region.SOLUTION: The press device comprises: an upper press head; and a vertical movement mechanism for vertically moving the upper press head, and presses a particle member formed on a particle member formation body by taking down the upper press head by the vertical movement mechanism. The press device comprises: a crystal piezoelectric type sensor for detecting a press force by the upper press head; and a pressure control means for controlling the vertical movement mechanism based on the press force detected by the crystal piezoelectric type sensor. The vertical movement mechanism consists of a servo press having a servo motor with high responsiveness as a driving source and low reduction gear ratio; and vertical movement parts with light-weight and high rigidity. |
