| 发明名称 |
SUBSTRATE SUPPORTING APPARATUS |
| 摘要 |
<p>The present invention relates to a substrate supporting apparatus (100), comprising a plurality of arms (110) to support a substrate (10); and supporting pins (120) which are installed on the upper parts of each arm (110) and contact the lower surface of the substrate to support the same (10).</p> |
| 申请公布号 |
KR20150022522(A) |
申请公布日期 |
2015.03.04 |
| 申请号 |
KR20130100543 |
申请日期 |
2013.08.23 |
| 申请人 |
SOLARWAY, INC.;LEE, SEUNG HO |
发明人 |
LEE, SEUNG HO |
| 分类号 |
C03B27/00;C03B27/012 |
主分类号 |
C03B27/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
