| 摘要 |
Provided is a method for measuring the shape of the surface of an object (12) by moving a contact probe (1) along the surface of the object (12). The relationship between the surface of the object (12) and the direction of a moving unit (8, 9, 10) is supposed from the magnitudes of the components of a contact force applied to the probe (1). Thus, the contact force of the probe (1) is controlled using only a moving unit (8, 9, 10) that is determined to be nearly orthogonal to the surface of the object (12) under measurement. |
