| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus capable of suppressing or eliminating the occurrence of giant particles unsuitable for film deposition. <P>SOLUTION: The film deposition particle conveying apparatus includes: a giant particle trap 17 provided at a first branch point of a conveying tube 2 extending from a particle generating chamber 1; a film deposition valve 18A of the conveying tube 2, heading toward a substrate 8 in a film deposition chamber 3, provided at a second branch point of the conveying tube 2 branched from the first branch point; and a collecting valve 18B of the conveying tube 2, heading toward an excess particle trap 19 in the film deposition chamber 3. The giant particle trap 17 collects giant particles flowing over the first branch point of the conveying tube 2 from the particle generating chamber 1. The film deposition valve 18A and the collecting valve 18B feed nanoparticles opened and closed respectively in film deposition and flowing to the second branch point, to the substrate 8, and feed nanoparticles opened and closed respectively at the stop of film deposition and flowing to the second branch point, to the excess particle trap 18. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
