Valve and processing apparatus provided with the same

摘要

A disclosed valve comprises a first valve body including first and second openings that permit gaseous communication between a chamber and an evacuation apparatus; a sealing valve element that moves near/away from the second opening to open/close the second opening; a sealing member provided in the sealing valve element to seal the second opening when the sealing valve element closes the second opening; a valve element retreat area that is provided in an inner wall of the first valve body away from the second opening, and shields the sealing member from an inside of the first valve body when the sealing valve element is moved to the valve element retreat area; and a first pivot shaft that pivots the sealing valve element so that the sealing valve element may be located in one of the second opening and the valve element retreat area.

主权项

1. A valve provided between a chamber an inside of which may be maintained at reduced pressure and an evacuation apparatus that evacuates the chamber, the valve comprising:
a first valve body including a first opening and a second opening that permit gaseous communication between the chamber and the evacuation apparatus, the second opening being formed in one inner wall of the first valve body; a sealing valve element that moves near/away from the second opening so as to open/close the second opening, the sealing valve element being located in the first valve body; a sealing member provided in the sealing valve element so as to seal the second opening when the sealing valve element closes the second opening; a protection sealing member provided in the sealing valve element so as to surround the sealing member; a valve element retreat area that is formed in the one inner wall of the first valve body and has a circular concave portion in a center of the valve element retreat area, a bottom surface of the circular concave portion being made of the one inner wall of the first valve body (61-seal) so as to be fixedly closed and having a uniform depth from an inner surface of the one inner wall, wherein the sealing member is air-tightly sealed from an inner space of the first valve body by completely enclosing the sealing member in the circular concave portion, the sealing valve element, and the protection sealing member, and by pressing the protection sealing member onto an area of the one inner wall surrounding the circular concave portion when the sealing valve element is moved away from the second opening to the valve element retreat area, wherein a diameter of the circular concave portion, the bottom surface of which has the uniform depth from the inner surface of the one inner wall, is greater than an outer diameter of the sealing member and smaller than an inner diameter of the protection sealing member; and a first pivot shaft that pivots the sealing valve element so that the sealing valve element may be located in one of the second opening and the valve element retreat area.