Regenerable pleated filter medium

摘要

The present invention provides regenerable pleated media and filter elements and combinations thereof for use in a clean room environment for removal of airborne molecular contamination. Disclosed is a pleated filter media for a clean room environment wherein the pleated filter media comprises at least an adsorbent first layer of activated carbon or polymer wherein said activated carbon or polymer together with fibers and/or an adhesion agent is enclosed between two second layers of non woven with a grid positioned on at least one side of either of the second layers or incorporated in the first layer for preventing deformation of the pleated filter media when regenerated by a heated air flow above 100° C. at 1 atm.

主权项

1. An apparatus comprising:
a heat resistant pleated filter media, which does not release particles above ISO Class 6 environment according to standard ISO 14644-1, for a clean room environment, the pleated filter media regenerable by heated air flow above 125° C. at 1 atm, said pleated filter media being heat resistant to melting and burning for temperatures of up to at least 190° C., and including: at least an adsorbent first layer of activated carbon or polymer wherein said activated carbon or polymer together with heat resistant fibers or an adhesion agent or a combination of heat resistant fibres and adhesion agent is enclosed between two second heat resistant layers of heat resistant non-woven with a heat resistant support grid positioned on at least one side of either of the second layers or incorporated in the first layer for preventing deformation of the pleated filter media when regenerated by a heated air flow above 125° C. at 1 atm.