发明名称 Apparatus for processing electronic devices
摘要 An apparatus for processing electronic devices includes a rotary turret having first device concentric around the rotary turret, which transfer the electronic devices; a rotary wheel having second device holders concentric around the rotary wheel, which receive the electronic devices and a processing device to process the electronic devices. The rotary turret rotates the first device holders along a first circular path, and the rotary wheel rotates the second device holders along a second circular path. The first axis of the rotary turret is perpendicular to the second axis of the rotary wheel, and that a projection of the second circular path of the second device holders in a direction perpendicular to the second axis of the rotary wheel onto the first circular path of the first device holders defines a line from the inside to the outside of the first circular path of the first device holders.
申请公布号 US8967368(B2) 申请公布日期 2015.03.03
申请号 US201314047143 申请日期 2013.10.07
申请人 ASM Technology Singapore Pte Ltd 发明人 Cheng Chi Wah;Lau Kai Fung
分类号 B65G29/00;B65G47/84;H01L21/677 主分类号 B65G29/00
代理机构 Ostrolenk Faber LLP 代理人 Ostrolenk Faber LLP
主权项 1. An apparatus for processing electronic devices, the apparatus comprising: a rotary turret having first device holders that are concentrically arranged around the rotary turret, the first device holders being for transferring the electronic devices; a rotary wheel having second device holders that are concentrically arranged around the rotary wheel, the second device holders being for receiving the electronic devices from the first device holders to be processed; and a processing device arranged on a common plane on which the second device holders are operative to rotate, the processing device being configured to process the electronic devices, wherein the rotary turret is rotatable about a first axis to move the first device holders along a first circular path, and the rotary wheel is rotatable about a second axis to move the second device holders along a second circular path, the rotary turret and the rotary wheel being arranged such that the second axis of the rotary wheel is perpendicular to the first axis of the rotary turret, and that a projection of the second circular path of the second device holders in a direction perpendicular to the second axis of the rotary wheel onto the first circular path of the first device holders defines a line from the inside to the outside of the first circular path of the first device holders.
地址 Singapore SG