发明名称 APPARATUSES, DEVICE, AND METHODS FOR CLEANING TESTER INTERFACE CONTACT ELEMENTS AND SUPPORT HARDWARE
摘要 <p>A medium for predictably cleaning the contact elements (13) and support hardware of a tester interface (12), such as a probe card and a test socket, while it is still in manual, semi-automated, and automated handling device (16) and the electrical test equipment (10) is disclosed so that the functionality and performance of the individual die or IC package (15) may be electrically evaluated.</p>
申请公布号 KR101498359(B1) 申请公布日期 2015.03.03
申请号 KR20130049627 申请日期 2013.05.02
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址
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