| 发明名称 | Protection structure for metal-oxide-metal capacitor | ||
| 摘要 | A capacitor structure includes first and second sets of electrodes and a plurality of line plugs. The first set of electrodes has a first electrode and a second electrode formed in a first metallization layer among a plurality of metallization layers, wherein the first electrode and the second electrode are separated by an insulation material. The second set of electrodes has a third electrode and a fourth electrode formed in a second metallization layer among the plurality of metallization layers, wherein the third electrode and the fourth electrode are separated by the insulation material. The line plugs connect the second set of electrodes to the first set of electrodes. | ||
| 申请公布号 | US8971014(B2) | 申请公布日期 | 2015.03.03 |
| 申请号 | US201112984731 | 申请日期 | 2011.01.05 |
| 申请人 | Taiwan Semiconductor Manufacturing Company, Ltd. | 发明人 | Hua Wei-Chun;Chang Chung-Long;Chen Chun-Hung;Chao Chih-Ping;Cheng Jye-Yen;Tseng Hua-Chou |
| 分类号 | H01G4/228;H01L49/02;H01L23/522 | 主分类号 | H01G4/228 |
| 代理机构 | Lowe Hauptman & Ham, LLP | 代理人 | Lowe Hauptman & Ham, LLP |
| 主权项 | 1. A capacitor structure, comprising: a first set of electrodes having a first electrode and a second electrode formed in a first metallization layer among a plurality of metallization layers, wherein the first electrode and the second electrode are separated by an insulation material, the first electrode includes first fingers extending in a first direction, and the second electrode includes second fingers extending in the first direction, each of the first set of electrodes includes an L-shaped portion; a second set of electrodes having a third electrode and a fourth electrode formed in a second metallization layer among the plurality of metallization layers, wherein the third electrode and the fourth electrode are separated by the insulation material, the third electrode includes third fingers extending in a second direction orthogonal to the first direction, and the fourth electrode includes fourth fingers extending in the second direction, each of the second set of electrodes includes an L-shaped portion; and a plurality of L-shaped line plugs connecting the L-shaped portions of the second set of electrodes to the L-shaped portions of the first set of electrodes, wherein an entirety of an outer surface of each L-shaped line plug of the plurality of L-shaped line plugs is recessed with respect to an outer surface of the L-shaped portion of a corresponding electrode of the first set of electrodes. | ||
| 地址 | TW | ||