| 发明名称 | Electrostatic chuck | ||
| 摘要 | According to one embodiment, an electrostatic chuck includes: a ceramic dielectric substrate, an electrode, and a conductive member. The ceramic dielectric substrate has a first major surface on which a material to be adsorbed is to be mounted and a second major surface on a side opposite the first major surface. The electrode is interposed between the first major surface and the second major surface of the ceramic dielectric substrate. The conductive member is provided in a recess formed in the second major surface of the ceramic dielectric substrate. A tip end of the recess has a curved surface. | ||
| 申请公布号 | US8971008(B2) | 申请公布日期 | 2015.03.03 |
| 申请号 | US201213428527 | 申请日期 | 2012.03.23 |
| 申请人 | Toto Ltd. | 发明人 | Kondo Shunpei;Matsui Hiroki |
| 分类号 | H01L21/67;H01L21/683 | 主分类号 | H01L21/67 |
| 代理机构 | Carrier Blackman & Associates, P.C. | 代理人 | Carrier Blackman & Associates, P.C. ;Carrier Joseph P.;Sabourin Anne G. |
| 主权项 | 1. An electrostatic chuck comprising: a ceramic dielectric substrate having a first major surface on which a material to be adsorbed is to be mounted and a second major surface on a side opposite the first major surface; an electrode interposed between the first major surface and the second major surface of the ceramic dielectric substrate; and a conductive member provided in a recess formed in the second major surface of the ceramic dielectric substrate, a central portion of a tip end of the recess being semisperical surface, the electrode having an exposed portion the exposed portion being exposed along a curved surface of a part of the semispherical surface, the conductive member contacting the electrode at the exposed portion, wherein if the exposed portion has a diameter of L when viewed along a first direction going from the second major surface toward the first major surface and a curvature radius of the curved surface is R, L≦2R. | ||
| 地址 | Fukuoka JP | ||