发明名称 Method of fabricating thin film transistor substrate and organic light emitting display device using the same
摘要 A method of fabricating a thin film transistor substrate includes: forming a polymer layer on a glass substrate; forming a passivation layer on the polymer layer; forming a thin film transistor array on the passivation layer; and separating the glass substrate from the polymer layer by irradiating a laser from a rear surface of the glass substrate.
申请公布号 US8969128(B2) 申请公布日期 2015.03.03
申请号 US201213534245 申请日期 2012.06.27
申请人 LG Display Co., Ltd. 发明人 Cho Yoon-dong;Park Jong-Hyun;Yoon Soo-Young;Lee Mi-Jung;Choi Jae-kyung
分类号 H01L51/40 主分类号 H01L51/40
代理机构 Morgan, Lewis & Bockius LLP 代理人 Morgan, Lewis & Bockius LLP
主权项 1. A method of fabricating a thin film transistor substrate, comprising: forming a polymer layer directly on a glass substrate; forming a passivation layer on the polymer layer; forming a thin film transistor array on the passivation layer; and separating the glass substrate from the polymer layer by irradiating the polymer layer with a laser from a rear surface of the glass substrate.
地址 Seoul KR