| 发明名称 |
Microbolometer and pixel exploiting avalanche breakdown |
| 摘要 |
A novel detector apparatus and detection method for measuring temperature exploit the avalanche transition edge, and are useful for contact and remote sensing & imaging and microbolometry of thermal, THz, LWIR/MWIR/SWIR/NIR, and visible light. The invention allows uncooled operation at kHz frame rates. |
| 申请公布号 |
US8967859(B2) |
申请公布日期 |
2015.03.03 |
| 申请号 |
US201012764088 |
申请日期 |
2010.04.20 |
| 申请人 |
|
发明人 |
Harmon Eric S.;Salzman David B.;Hyland James T. |
| 分类号 |
G01K7/00;G01J5/00;G01J5/20;H04N5/33;H01L27/146;G01J5/02;G01J5/24 |
主分类号 |
G01K7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
1. An array of at least two microbolometer pixels for imaging incident infrared wavelengths including at each pixel:
a. A thermal absorber which absorbs said incident infrared wavelengths and converts the power of said incident infrared wavelengths into thermal energy, b. An avalanche breakdown transition edge diode in thermal contact with said thermal absorber, and c. A thermal link between said avalanche breakdown transition edge diode and a substrate,wherein said avalanche breakdown transition edge diode is configured to operate in an electrothermal feedback loop to stabilize the temperature of said avalanche breakdown transition edge diode. |
| 地址 |
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