Carrier assembly apparatus

摘要

[Problem] A carrier assembly apparatus which is able to be streamlined in structure is provided.;[Solution] The carrier assembly apparatus 1 comprises: an assembly table 31 which supports a base member 70 on which a die 90 is placed, a holding head 46 which holds a cover member 80, a pressure reduction head 44 which has a pressure reduction chamber 443 accommodating the cover member 80 and having an opening part 444 and which abuts against the assembly table 31 so as to form a sealed space, a first elevating actuator 43 which simultaneously move the holding head 46 and the pressure reduction head 44 to the assembly table 31, and a second elevating actuator 47 which moves the holding head 46 relative to the pressure reduction head 44.

主权项

1. A carrier assembly apparatus which assembles a test carrier having a base member and a cover member between which an electronic device is sandwiched, the carrier assembly apparatus comprising:
an assembly table which supports the base member on which the electronic device is placed; a holding head which holds the cover member; a pressure reduction head which has a pressure reduction chamber accommodating the cover member and having an opening part and which abuts against the assembly table so as to form a sealed space; a first moving device configured to simultaneously move the holding head and the pressure reduction head to the assembly table; and a second moving device configured to move the holding head relative to the pressure reduction head.