发明名称 Semiconductor device
摘要 A semiconductor device including a p or p+ doped portion and an n or n+ doped portion separated from the p or p+ doped portion by a semiconductor drift portion. The device further includes at least one termination portion provided adjacent to the drift portion. The at least one termination portion comprises a Super Junction structure.
申请公布号 US8970016(B2) 申请公布日期 2015.03.03
申请号 US201213486614 申请日期 2012.06.01
申请人 X-FAB Semiconductor Foundries AG 发明人 Antoniou Marina;Udrea Florin;Tee Elizabeth Kho Ching;Pilkington Steven John;Pal Deb Kumar;Hölke Alexander Dietrich
分类号 H01L29/02 主分类号 H01L29/02
代理机构 Thompson Hine L.L.P. 代理人 Thompson Hine L.L.P.
主权项 1. A lateral semiconductor device comprising: a p or p+doped portion; an n or n+doped portion separated from the p or p+doped portion by a semiconductor drift portion; and at least one termination portion provided adjacent to the drift portion, wherein the at least one termination portion comprises a Super Junction structure, and wherein the Super Junction structure comprises alternating layers of n doped and p doped material, the alternating layers being formed on top of each other and the interfaces of the alternating layers being parallel to the surface of the semiconductor device.
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