Laser irradiation apparatus and method of manufacturing organic light-emitting display apparatus using the same

摘要

A laser irradiation apparatus including a chamber configured to receive a panel including an organic layer on a substrate, a laser oscillator outside the chamber, and configured to irradiate a laser beam onto the panel in the chamber, and a transparent window at a side of the chamber, and configured to allow the laser beam to pass therethrough, wherein the laser beam is configured to remove at least a portion of the organic layer on the substrate.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
preparing a panel comprising an auxiliary electrode and a pixel electrode on a substrate; forming an organic layer on the auxiliary electrode and the pixel electrode while the panel is in a manufacturing equipment; and removing at least a portion of the organic layer from the auxiliary electrode by irradiating a laser beam onto the organic layer, the removing of the at least the portion of the organic layer comprising:
transferring the panel from the manufacturing equipment into a chamber of a laser irradiation apparatus;closing a door separating the chamber from the manufacturing equipment;irradiating the laser beam on the at least the portion of the organic layer formed on the auxiliary electrode while the panel is in the chamber; andremoving the at least the portion of the organic layer from the auxiliary electrode.