发明名称 Deposition mask and method for manufacturing organic light emitting display using the same
摘要 A deposition mask for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.
申请公布号 US8968477(B2) 申请公布日期 2015.03.03
申请号 US200912575001 申请日期 2009.10.07
申请人 Samsung Display Co., Ltd. 发明人 Kang Chang-Ho;Kim Tae-Seung;Hong Jae-Min
分类号 C23C16/50;C23C16/00;C23F1/00;H01L21/306;H01L27/32;H01L51/00;H01L51/56 主分类号 C23C16/50
代理机构 H.C. Park & Associates, PLC 代理人 H.C. Park & Associates, PLC
主权项 1. A deposition mask, comprising: a planar portion; and unit masks, each unit mask comprising: a single first opening and two first indentations arranged in a first row in the planar portion; anda plurality of second openings and a plurality of second indentations arranged in a second row in the planar portion, wherein: the first and second openings are configured to permit deposition of an organic emission layer on a substrate of an organic light emitting display; the first and second indentations are disposed on a side of the planar portion configured to face the substrate; the first and second indentations are configured to cover a previously deposited organic emission layer being disposed within the indentation; the previously deposited organic emission layer is formed in a sub-pixel; the first and second indentations are indented from the surface facing the substrate to a depth greater than a thickness of the previously deposited organic emission layer and less than half of a thickness of the deposition mask; a shape of the first opening is different from a shape of the second opening; and the first and second rows are spaced laterally apart from each other.
地址 Yongin KR