| 摘要 |
<p>Provide are an ion implanter and an ion implantation method capable of contributing to improvement in productivity in terms of magnetic field measurement. The ion implanter (100) includes an energy analyzer electromagnet (24) provided between an ion source and a processing chamber. The energy analyzer electromagnet (24) includes: a Hall probe (110) configured to generate a measurement output in response to a deflecting magnetic field; and an NMR probe (112) configured to generate an NMR output. A control part (102) of the ion implanter (100) includes: a magnetic field measurement part (114) configured to measure the deflecting magnetic field in accordance with a known correspondence between the deflecting magnetic field and the measurement output; a magnetic field determination part (118) configured to determine the deflecting magnetic field from the NMR output; and a Hall probe calibration part (120) configured to update the known correspondence by using the deflecting magnetic field determined from the NMR output and a new measurement output of the Hall probe (110) corresponding to the determined deflecting magnetic field.</p> |
