发明名称 |
Device for electrical characterization of molecules using CNT-nanoparticle-molecule-nanoparticle-CNT structure |
摘要 |
A method of forming an electrode is disclosed. A carbon nanotube is deposited on a substrate. A section of the carbon nanotube is removed to form at least one exposed end defining a first gap. A metal is deposited at the at least one exposed end to form the electrode that defines a second gap. |
申请公布号 |
US8968582(B2) |
申请公布日期 |
2015.03.03 |
申请号 |
US201213674492 |
申请日期 |
2012.11.12 |
申请人 |
International Business Machines Corporation |
发明人 |
Franklin Aaron D.;Smith Joshua T.;Tulevski George S. |
分类号 |
H01L21/00;H01L21/302;H01L21/461;B44C1/22;C03C15/00;C03C25/68;C23F1/00;H01B13/00;H05K1/02;B82Y40/00 |
主分类号 |
H01L21/00 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP ;Alexanian Vazken |
主权项 |
1. A method of forming electrodes, comprising:
depositing a carbon nanotube on a substrate; removing a section of the carbon nanotube to form a first carbon nanotube segment having a first exposed end and a second carbon nanotube segment having a second exposed end, wherein the exposed end of the first carbon nanotube segment and the exposed end of the second carbon nanotube segment define a first gap; and depositing a metal at the exposed end of the first carbon nanotube segment to form a first electrode and at the exposed end of the second carbon nanotube to form a second electrode, wherein the first electrode and the second electrode define a second gap. |
地址 |
Armonk NY US |