发明名称 Device for electrical characterization of molecules using CNT-nanoparticle-molecule-nanoparticle-CNT structure
摘要 A method of forming an electrode is disclosed. A carbon nanotube is deposited on a substrate. A section of the carbon nanotube is removed to form at least one exposed end defining a first gap. A metal is deposited at the at least one exposed end to form the electrode that defines a second gap.
申请公布号 US8968582(B2) 申请公布日期 2015.03.03
申请号 US201213674492 申请日期 2012.11.12
申请人 International Business Machines Corporation 发明人 Franklin Aaron D.;Smith Joshua T.;Tulevski George S.
分类号 H01L21/00;H01L21/302;H01L21/461;B44C1/22;C03C15/00;C03C25/68;C23F1/00;H01B13/00;H05K1/02;B82Y40/00 主分类号 H01L21/00
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP ;Alexanian Vazken
主权项 1. A method of forming electrodes, comprising: depositing a carbon nanotube on a substrate; removing a section of the carbon nanotube to form a first carbon nanotube segment having a first exposed end and a second carbon nanotube segment having a second exposed end, wherein the exposed end of the first carbon nanotube segment and the exposed end of the second carbon nanotube segment define a first gap; and depositing a metal at the exposed end of the first carbon nanotube segment to form a first electrode and at the exposed end of the second carbon nanotube to form a second electrode, wherein the first electrode and the second electrode define a second gap.
地址 Armonk NY US