| 发明名称 | Method of manufacturing organic light emitting display apparatus | ||
| 摘要 | A method of manufacturing an organic light emitting display apparatus, the method includes loading a substrate on a moving unit, determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction and forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber. The patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate. | ||
| 申请公布号 | US8969114(B2) | 申请公布日期 | 2015.03.03 |
| 申请号 | US201314040262 | 申请日期 | 2013.09.27 |
| 申请人 | Samsung Display Co., Ltd. | 发明人 | Jang Joo-Nyung |
| 分类号 | H01L21/00;H01L51/56;H01L27/32;H01L51/00;H01L21/67 | 主分类号 | H01L21/00 |
| 代理机构 | Innovation Counsel LLP | 代理人 | Innovation Counsel LLP |
| 主权项 | 1. A method of manufacturing an organic light emitting display apparatus, the method comprising: loading a substrate on a moving unit, wherein the moving unit is configured to move along a first direction; determining an angle formed between a side of the substrate and an opening in a patterning slit sheet, wherein the side of the substrate and the opening in a patterning slit sheet extends substantially along the first direction; rotating the patterning slit sheet by two X motors so that the side of the substrate and the opening in a patterning slit sheet extend along the same direction, a first X motor of the two X motors configured to move the patterning slit sheet in one predetermined direction and a second X motor of the two X motors configured to move the patterning slit sheet in the other predetermined direction opposite to the one predetermined direction while rotating the patterning slit sheet, the first X motor and the second X motor configured to move the patterning slit sheet by the same distance; forming a layer on the substrate while conveying the substrate on the moving unit in the first direction in a chamber, wherein the patterning slit sheet moves along a direction perpendicular to the first direction during the forming the layer on the substrate so that a deposition layer having a linear pattern that extends along the first direction is formed on the substrate. | ||
| 地址 | KR | ||