METHOD OF FORMING BUCKLING OF THIN FILMS AND A ELEMENT USING THE THIN FILMS

摘要

The present invention relates to a method of self-generating buckling using a sol-gel solution allowing the formation of a hard film fomed of an inorganic compound without using a soft material of which use is limited in relation to an optical or mechanical characteristic. According to the method of the present invention, when a thin film is formed by depositing the sol-gel solution on the substrate, an amount of a stabilization agent included in the sol-gel solution to lower the drying speed of the sol-gel solution is controlled, so that the self-generating buckling is formed in the process of hardening the sol-gel solution.