发明名称 |
Method of manufacturing a sensor network incorporating stretchable silicon |
摘要 |
A method of manufacturing a sensor network is described which includes stretching a silicon substrate over a desired area, and generating a plurality of nodes fabricated on the stretchable silicon substrate. The nodes include at least one of an energy harvesting and storage element, a communication device, a sensing device, and a processor. The nodes are interconnected via interconnecting conductors formed in the substrate. |
申请公布号 |
US8966730(B1) |
申请公布日期 |
2015.03.03 |
申请号 |
US201113084729 |
申请日期 |
2011.04.12 |
申请人 |
The Boeing Company |
发明人 |
Carralero Michael Alexander;Vian John Lyle |
分类号 |
H01L41/04;H01L41/25;H01L41/29;B82Y40/00;G01M5/00;B82B3/00;H01L41/08;H01L21/02;B82Y30/00;B82Y10/00 |
主分类号 |
H01L41/04 |
代理机构 |
Armstrong Teasdale LLP |
代理人 |
Armstrong Teasdale LLP |
主权项 |
1. A method for fabricating a network comprising:
stretching a silicon medium over a desired area; processing the stretched silicon medium to generate a number of nodes thereon, at least a first portion of the nodes including an energy harvesting and storage element having zinc oxide nanowires grown on the silicon medium, at least a second portion of the nodes including at least one of a communication device, a sensing device, and a processor; and utilizing conductors within the stretchable silicon medium to redundantly interconnect the generated nodes to form the network. |
地址 |
Chicago IL US |