发明名称 Method of manufacturing a sensor network incorporating stretchable silicon
摘要 A method of manufacturing a sensor network is described which includes stretching a silicon substrate over a desired area, and generating a plurality of nodes fabricated on the stretchable silicon substrate. The nodes include at least one of an energy harvesting and storage element, a communication device, a sensing device, and a processor. The nodes are interconnected via interconnecting conductors formed in the substrate.
申请公布号 US8966730(B1) 申请公布日期 2015.03.03
申请号 US201113084729 申请日期 2011.04.12
申请人 The Boeing Company 发明人 Carralero Michael Alexander;Vian John Lyle
分类号 H01L41/04;H01L41/25;H01L41/29;B82Y40/00;G01M5/00;B82B3/00;H01L41/08;H01L21/02;B82Y30/00;B82Y10/00 主分类号 H01L41/04
代理机构 Armstrong Teasdale LLP 代理人 Armstrong Teasdale LLP
主权项 1. A method for fabricating a network comprising: stretching a silicon medium over a desired area; processing the stretched silicon medium to generate a number of nodes thereon, at least a first portion of the nodes including an energy harvesting and storage element having zinc oxide nanowires grown on the silicon medium, at least a second portion of the nodes including at least one of a communication device, a sensing device, and a processor; and utilizing conductors within the stretchable silicon medium to redundantly interconnect the generated nodes to form the network.
地址 Chicago IL US