发明名称 Semiconductor device and method of manufacture thereof
摘要 A structure including a substrate, an intermediate layer provided and formed directly onto the substrate, a transition region, and a group II-VI bulk crystal material provided and formed as an extension of the transition region. The transition region acts to change the structure from the underlying substrate to that of the bulk crystal. In a method of manufacture, a similar technique can be used for growing the transition region and the bulk crystal layer.
申请公布号 US8968469(B2) 申请公布日期 2015.03.03
申请号 US201012901780 申请日期 2010.10.11
申请人 Kromek Limited 发明人 Basu Arnab;Robinson Max;Cantwell Ben;Brinkman Andy
分类号 C30B21/02;H01L21/02;C30B11/00;C30B29/48 主分类号 C30B21/02
代理机构 Popovich, Wiles & O'Connell, P.A. 代理人 Popovich, Wiles & O'Connell, P.A.
主权项 1. A structure including a substrate, an intermediate layer provided and formed directly onto the substrate, a transition region, and a group II-VI bulk crystal material provided and formed as an extension of the transition region, wherein the substrate comprises a substrate of silicon, gallium arsenide, germanium, or silicon carbide, the substrate has a thickness of at least 100 microns, the bulk crystal material has a thickness of at least 700 microns, the intermediate layer has a thickness of between 25 and 1000 microns, and the transition region between the intermediate layer to the material of the bulk crystal has a thickness of between 10 and 500 microns.
地址 Sedgefield GB