| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring the surface roughness of a polishing pad with which a surface roughness index of the polishing pad can be measured, which indicates strong relevance with polishing performance.SOLUTION: A method of measuring the surface roughness of a polishing pad 2 includes the steps of: acquiring an image of the surface of the polishing pad by using a laser microscope 30; selecting only areas higher than the average height from the acquired image; and calculating the surface roughness only from the selected areas. |
