APPARATUS AND METHOD FOR ARRAY SUBSTRATE INSPECTING

摘要

In the present invention, disclosed are an apparatus and a method for inspecting an array substrate, which can inspect an array substrate by a non-contact scheme before a bonding process with a color filter substrate. According to the present invention, the apparatus for inspecting an array substrate including a plurality of pixel regions includes: a metal electrode array disposed at an upper part of the array substrate to correspond to each of the pixel region to store an electrical charge induced through an electric field generated due to a voltage difference with the array substrate; a voltage supply unit to apply a voltage to the array substrate and the metal electrode array; a converter to convert the electrical charge stored in each of the metal electrode to a voltage and output the voltage; an AD converter to receive the voltage outputted from the converter convert the voltage to a digital signal and output the digital signal; and an image generating device to generate an inspection image based on the digital signal outputted from the AD converter.