| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation method capable of more surely observing the inside of an object by using a focused ion beam method.SOLUTION: By performing processing using the focused ion beam method, removal processing is performed on a processing area 6 of an object 2 so as to expose an observation area 5, and the observation area 5 is observed. The processing area 6 is determined so as to have a triangular prism shape. The processing area 6 is triple or more as long as the observation area 5 with respect to the same direction as a length in a planar view of the observation area 5. An observation plane 6a on which the observation area 5 is formed, in a depth direction is twice or more as long as the observation area 5 in a depth direction. In a direction along a principal surface, the length of the processing area 6 regarding a direction orthogonal with a direction in which the length extends in the planar view of the observation area 5, is equal to or more than the length of the observation plane 6a in the depth direction. |
